| Product Name | TSL-SP7-LS3 | TSL-SP7-LS2 |
|---|---|---|
| Product brief | Min. line/space width: 3um above Min. defect size: 1um |
Min. line/space width: 2um above Min. defect size: 0.75um |
| Inspection object | Mask | |
| Max. install size | 800mm X 700mm | |
| Max. inspection area | 750mm X 650mm | |
| Inspection time | < 50min <50min(500 X 400 inspection area) |
|
| Inspection mode | DRC+REF | |
| Defect type | Stains/flock/scratches/dust/damage/fingerprints | |
| Data reference mode | ||
| Defect type of reference mode | Open/Short, pinhole,dust, scratch PAD shift, wrong pattern size, etc… |
|
| Inspection ability | Min. line/space width: 3um above Min. defect size: 1um |
Min. line/space width: 2um above Min. defect size: 0.75um |
| Work station of data reference mode | ||
| Data format supported | RS274X、ODB++、GDSII、DXF | |
| DRC function | ||
| Auto feeding system | ||
| HEPA protect system | Option | Option |
| Autofocus | ||
| Redundant system | ||
| Big storage device | Option | Option |
| Dimension | W1450 X D1650 X H1600 (mm) | |
