Film / Photomask / Reticle Inspection system


Overview

Film/ Photomask inspection origin

In the early period, film and photomask are inspected by “light table”. However, there are great film/photomask need to be inspected, and it’s easy to make mistake by human inspection, for example human eye’s fatigue or human negligence. These mistakes will delay the shipment. S○ the AOI film/photomask system develops from human inspection.

What is AOI

The principle of AOI: Computer program is the core. The digital camera will capture the images, After the capturing the system will process the images with the pre-define recipe to detect the defects. The defects will be displayed for reviewing and repairing. The inspection system can reduce damages and promote product quality.

Advantages of AOI:

  • High resolution optical system can detect tiny circuits or tiny components.
  • High Throughput with low loss rate, especially in mass production can highlight the production efficiency.
  • Save all of the defect images for further analysis and traceability.

Compared with his brand inspection system advantages

  • AOI detection of the core is nothing more than the lens, light and software programs.
  • Tester Soft film/photomask inspection system lens is mainly purchased in Europe, the Americas, Japan, the production of large manufacturers.
  • Tester soft film/photomask inspection system adopt high uniformity high resolution backlight illumination system, that is using the same design principle as the exposure machine.
  • Tester soft film/photomask inspection system adopt high uniformity high resolution backlight illumination system, that is using the same design principle as the exposure machine.