TSL-SP7-LS Series detects extremely small defects from 1 to 0.75 microns. Its high-resolution imaging system combined with its independently developed LED light source enables the smallest defects to be clearly captured
The system can inspect various types of graphics, whether simple or complex, and can provide comprehensive inspection capabilities to ensure the accuracy and completeness of detection.
The photomask placement platform adopts a stepless fine-adjustable design with a standard size of 800 x 700 mm., Customization platform:MAX. 850 x 960 mm,Meet the needs of different specifications
Equipped with AutoFocus system（AF）,ensure that every inspection picture is clear and sharp, and prevent defects from being missed.
The equipment design reserves space for installing a HEPA air filtration system. If there is a need for higher cleanliness, it can be optional to ensure the cleanliness of the testing environment.
The TSL-SP7-LS series equipment is integrated with the workstation, making effective use of space. It only covers an area of approximately W1450 x D1650 x H1600 mm, and is suitable for various laboratory and production line layouts.
