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Film / Photomask / Reticle Inspection system
Special Function
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EX4
DX 6.0
DX 6.5
DX 6 Super
DX6 Super High
DX6 Super High Plus
TSL-SP7-LS3
TSL-SP7-LS2
Metal Mask / Stencil Inspection system
Special Function
Inspection ability
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MVS4
MVS6
PCB SolderMask-Finished Pattern Inspection system
Special Function
Inspection ability
Model Comparison
DVI M1
DVI P2
DVI A3
GTS-V2
Pellicle+Mask Inspection System
Special Function
Inspection ability
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TSL-PEL-DRC
TSL-PEL-REF
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Photomask / Reticle Inspection System
TSL-SP7-LS3
Large inspection area, tiny defect out.
Autofocus can overcome defocus issue and take Clear images.
Min. defect size:1um
Large inspection area, tiny defect out. Autofocus can overcome defocus issue and take Clear images. Min. defect size:1um
Overview
Special Function
Inspection Ability
Model Comparison
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