Large inspection area, tiny defect out.
Autofocus can overcome defocus issue and take
Clear images.
Min. defect size:1.5um
Large inspection area, tiny defect out.
Autofocus can overcome defocus issue and take
Clear images.
Min. defect size:1.5um
Application
Inspect defects on the photomask/reticle by optical lens capturing system. The inspection system can reduce damages and promote product quality.
Autofocus can overcome defocus issue and keep
Clear images.
Performance
Inspection time:
< 50 min 0.36 µm/pixel (Inspection area:500 x 400mm)
Inspection ability:
Minimum line /space width : down to 4.5µm
Min. defects size : 1.5 µm
System resolution : 0.36 um/pixel
Inspection mode: DRC can run with Data reference mode simultaneously. Inspection mode(Design Rule Check):
To determine defect by user's parameters and system embedded logic.
Simple for operation and no need reference required.
When parameter or image changed, system will update new defect detected results and display.
Review on Fly:
You do not need waiting scanning finished for review, when the system start scanning you can star review the defects in the same time.
From scan to review equal 0 second.
Preview various defect images at the same time.
Measurement:
Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance.
Real-time multi-language:
Change the language does not need to restart the software, suitable for multi-language environment. (Traditional Chinese, Simplified Chinese, English, Japanese)
Computer Backup Systems:
Dual hard disk / dual operating system to quickly resolve system exceptions, real time switch, the system does not halt.