Film / Photomask / Reticle Inspection System


TSL-FVT-DX6 Super High Plus

Application

Inspect defects on the photomask/reticle by optical lens capturing system. The inspection system can reduce damages and promote product quality. Autofocus can overcome defocus issue and keep Clear images.

Performance

Inspection time:
    < 50 min 0.36 µm/pixel (Inspection area:500 x 400mm)
Inspection ability:
  • Minimum line /space width : down to 4.5µm
  • Min. defects size : 1.5 µm
  • System resolution : 0.36 um/pixel
Inspection mode: DRC can run with Data reference mode simultaneously.
 Inspection mode(Design Rule Check):
  • To determine defect by user's parameters and system embedded logic.
  • Simple for operation and no need reference required.
  • Inspect irregular broken/connection, pinhole, dirt, protrusion, violate minimum line/space width etc.
 Data Reference:
  • Data reference:To compare captured image with reference data. We emphasized that lost PAD on the photomask, image shifted and change of pattern size.
  • Supported reference data format: Gerber RS274X, ODB++, GDSII and DXF(CAD).
  • Equipped with standalone workstation for preprocessing.
Real-time Autofocus:
    Supported reference data format: Gerber RS274X, ODB++, GDSII and DXF(CAD). Equipped with standalone workstation for preprocessing.
Adjustable fixture:
    Applies for various size of photomask.
Easy Parameter Setting:
    Automatic core parameter, Dust Sweep, Ignore Blank Area, Skip Model, etc.
What You See Is What You inspect:
    When parameter or image changed, system will update new defect detected results and display.
Review on Fly:
  • You do not need waiting scanning finished for review, when the system start scanning you can star review the defects in the same time.
  • From scan to review equal 0 second.
  • Preview various defect images at the same time.
Measurement:
    Line width, Space width, Circular, Rectangle, Rotated Rectangle, Central distance, Gap Distance, Long Distance.
Real-time multi-language:
    Change the language does not need to restart the software, suitable for multi-language environment. (Traditional Chinese, Simplified Chinese, English, Japanese)
Computer Backup Systems:
    Dual hard disk / dual operating system to quickly resolve system exceptions, real time switch, the system does not halt.