small dirt on Pellicle
big dirt on Pellicle
scratch on pellicle
fur on pellicle
fur on pellicle
fingerprint on pellicle
fingerprint on pellicle
pinhole on the photomask pattern
dirt or particle on photomask pattern
scratch on photomask pattern
fur on photomask pattern
crack/protrusion on photomask pattern
open/short on photomask pattern
pattern size change on photomask
pattern shift on photomask
