TSL-FVT-DX3.0 ∣ TSL-FVT-DX3.5  ∣  TSL-FVT-Super plus  ∣ TSL-MVS  ∣  Laser Repair

TSL-FVT-Super plus Glass Mask Inspection System       HOME

 

             MEASUREMENT FUNCTION

v Line width measurement, space width measurement
v Round PAD measurement, Long/Square PAD
     measurement
v Measure Gap Shortest Distance
v Assistant function: Long distance measurement

‧Measurement functions provide round, square, space width/ line
    width and long distance measurement. It's applied for verifying the 
    object size in the real image.
‧Result will display directly and is more convenient for end-users to
    inspect.
‧Inspect the image directly under the situation of shortage of line
    width space/width and the different size of PAD.

Measured images by Super plus(Unit：um)

▽ Line width measurement   ▽Space width measurement     ▽Round PAD measurement
             

▽Square PAD measurement  ▽Rotate rectangle measurement ▽ Measure Gap Shortest Distance
             

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‧Assistant function-Long distance measurement：Measure the distance of
    two features belong to two images individual.

  ▽First step: Select shapes                     ▽Second step: Mark the first point
              
▽Third step: Mark the second point   ▽Final：The result of long distance
                                                                                  measurement
              

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