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TSL-FVT-Super plus  Glass Mask Inspection System

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           DESIGN RULE CHECK (DRC)

 v Applied for medium/high level inspection, we  
     emphasized accuracy and efficiency.
 v  Auto-DRC parameter setting in company with fine tune
     conforming to the inspection needs.
 v Guaranteeing to inspect all defects with DRC function.
 v Marking box with different color to show various defects.

Defect types

 ‧10um glass mask inspection
 
     ▽Pin hole                           ▽Dirt                                 ▽Fur
               

▽Protrusion /Small nick          ▽Dirt                        ▽Open/Short
               

▽Water stain shade    ▽Failure of line width   ▽Failure of space width
               

Ignored model verify!!

‧Purpose：To avoid fake defects
  ▽ Target defect               ▽ To Sample             ▽ To Mark fake position
                

Ignored blank area!!
‧Purpose：Dirt in blank area will be excluded.

▽ The dirt position          ▽ Turn on           ▽Defects located in blank          
                                                                                  area will be ignored          
                

Ignored acute angle
‧Purpose：To avoid grids and reduce false detection.

                     ▽Turn off                                  ▽Turn on
                                     

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