TSL-FVT-DX3.0
∣
TSL-FVT-DX3.5
∣ TSL-FVT-Super
plus ∣
TSL-MVS ∣
Laser Repair
TSL-FVT-Super
plus
Glass Mask Inspection
System
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Inspected minimum space width /line width:10um ♦ We Provide DRC and Data reference mode for inspection tiny circuit on the glass mask. ♦ Inspection by high magnification- The image won't be out of focus. ♦ Auto-DRC parameter setting in company with fine tune conforming to the inspection needs. ♦ Conquer glass mask bending by auto focus. ♦ Platform for glass mask could be adjusted. ♦ Guaranteeing to inspect al defects with ignore blank area and MDF |

