TSL-FVT-DX3.0
∣
TSL-FVT-DX3.5
∣
TSL-FVT-Super plus ∣
TSL-MVS
∣ Laser Repair
TSL-MVS
Metal
Mask Inspection
System
HOME 
Major Specification
| Model | TSL-MVS |
| Inspection Object | Metal mask |
| Minimum space/line width | 20 um |
|
Resolution (um/pixel) |
1.8~10 |
| Type of defect | Pin hole/ inexistent hole/ hole shift/ scratch/ dust/ protrusion |
| Platform | 740 x 950mm |
| Inspection Area | 450 x 4500mm |
| Dimensions/Weight |
L 1550 x W 1350 x H1600 (mm)
/ APPROX. 550kg |
| Power |
110/220 Volt (50/60Hz)
1 Phase / Under 3KVA |
|
Consumable (option) |
Flash light lamp /LED ring light/stamp ink |
| Working Environment |
Temp：15~30℃ Humidity：35%~70% |