|
Model |
Laser
Repair |
|
Inspection Object |
Film /Glass
Mask/ITO |
|
Type |
Nd-YAG Laser |
|
Wavelength |
1064/532nm |
|
Micro lens |
Mitutoyo |
|
Lens |
2x 、 5x 、 20x |
|
Pulse |
Q-Switch |
|
Input power |
1-5mJ/pulse |
|
Adjust
difference |
Within±10um |
|
Platform |
Automatic
pneumatic and cushion platform |
|
Working range |
560x400x100mm(X.Y.Z
axis) |
|
Resolution |
Glass Scales
10um |
|
Monitor |
22" LCD Monitor |
|
Camera |
CCD resolution 780*580 |
|
Light |
Adjustable LED back light
|
|
Beam of light pattern |
Rectangle/square, theta angle±90˚
revolving, adjustable |
|
Repeatability |
10um |
|
Method of operation |
Manual |
|
Dimensions |
141x136x177(cm) |
|
Weight |
Under 1100kg(Including) |