TSL-FVT-DX3.0
∣
TSL-FVT-DX3.5
∣
TSL-FVT-Super plus ∣
TSL-MVS
∣ Laser Repair
TSL-FVT-DX3.5 Film/Glass Mask Inspection System |
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Major Specification
| Model |
TSL-FVT-DX3.5 (Data Reference mode + DRC) |
| Inspection Object | Film /Glass Mask |
| Minimum space/line width | 15um |
|
Resolution (um/pixel) |
1.5~9 |
| Type of defect | Broken line/Pin hole/Dirt/Scratch/Circuit nick/Water Stain Shade |
| Platform | 794 x 679mm (31.2 x 26.7 inch) |
| Inspection Area | 710 x 580mm (27.9 x 22.8 inch) |
| Dimensions/Weight |
L 1550 x W 1350 x H1600 (mm)
/ APPROX. 550kg |
| Power |
110/220 Volt (50/60Hz)
1 Phase / Under 3KVA |
|
Consumable (option) |
Flash light lamp /marking stamp/stamp ink |
| Working Environment |
Temp：15~30℃ Humidity：35%~70% |
| Glass Mask Holder (option) |
1.X,Y
size cab be adjusted 2. Horizontal or surface can be adjusted 3. Min. mask size 152x152mm(6x6inch) 4. Max. mask size 610x508mm(24x20inch) |