TSL-FVT-DX3.0 ∣ TSL-FVT-DX3.5 ∣ TSL-FVT-Super plus ∣ TSL-MVS ∣ Laser Repair

TSL-FVT-DX3.0 Film/Glass Mask Inspection System HOME

                  Design Rule Check (DRC)

v Applied for medium/high level inspection, we
    emphasized accuracy and efficiency.
v Auto-DRC parameter setting in company with fine tune
    conforming to the inspection needs.
v Guaranteeing to inspect all defects with DRC function.
v Marking box with different color to show various defects.

Defect types

       ▽Pin hole                          ▽Dirt                               ▽Fur


   ▽Protrusion                         ▽Dirt                        ▽Circuit nick


▽Water stain shade    ▽Failure of line width   ▽Failure of space width

Ignored model verify!!
‧Purpose：To avoid fake defects

▽ Target defect ▽ To Sample ▽ To Mark fake position

Ignored blank area!!
‧Purpose：Dirt in blank area will be excluded.

▽ The dirt position            ▽ Turn on                ▽Defects located in blank
                                                                                     area will be ignored

Ignored acute angle
‧Purpose：To avoid grids and reduce false detection.

▽Turn off ▽Turn on